New paper

The partners P2- IMT and P1-SINTEF have published a new paper –Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching, Angela M. Baracu,Christopher A. Dirdal,Andrei M. Avram,Adrian Dinescu,Raluca Muller,Geir Uri Jensen,Paul Conrad Vaagen Thrane and Hallvard Angelskår, Micromachines 2021, 12(5), 501; https://doi.org/10.3390/mi12050501