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Results 2019
a) Finite Difference Time Domain Simulations of the ratio of transmitted cross-polarization through the infinite array of identical metamaterial structures. b) The two unit cells considered: One consisting of Si (n=3.5) with straight walls, and the other consisting of silicon covered by air-cylinders (n=1) in order to mimic the scallop surface resulting from DRIE using the Bosch process
SEM characterization of the obtained structures
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2019
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