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Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching

Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

Characterization of Monochromatic Aberrated Metalenses in Terms of Intensity-Based Moments

Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography

Phase-controlling infrared thermal emitting metasurfaces